Praxair Electronics Expands Advanced Components Manufacturing Capacity and Technology
July 06, 2004
DANBURY, Conn., July 6, 2004 — Praxair Electronics, a division of Praxair, Inc. (NYSE: PX), has announced major upgrades of four of its Advanced Components facilities in North America. As a result, Praxair can now offer the semiconductor industry improved tool-manufacturing processes by serving as an integrated supplier for the complete fabrication of critical chamber components for both 200mm and 300mm geometries.
The multi-million dollar upgrades permit highly automated, precision electrostatic chuck manufacturing in Poughkeepsie, N.Y., more advanced ceramic technology in Seattle, Wash., as well as expansions in machining, coating, and cleaning operations in Phoenix, Ariz. and Houston, Texas.
Praxair Electronics' unique combination of ceramic powder and coatings technology, combined with its Advanced Components facilities upgrades, now offer an integrated process for manufacturing a wide array of chamber components and applying advanced coatings materials. Manufacturing facilities upgrades include the installation of new CNC machining systems, robotic preparation equipment, automated anodize plating controls and inspection/test equipment.
"One key differential in our components manufacturing is our surface treatment technologies for improved processing and durability," states Mark Gruninger, vice president of Praxair Electronics. "Fabs can improve processing yields through reduced particle generation and optimize chamber component life by specifying Praxair ceramic coating technologies."
Praxair's commitment to material science, combined with our facilities upgrades, centralizes chamber fabrication as a single-source partner for manufacturing, anodizing and coatings for 200mm and 300mm chamber parts, reducing cycle times for equipment manufacturing and assembly," adds Tony Kenyon, managing director of Praxair's Advanced Components business.
Chamber components are used in etch, chemical vapor deposition (CVD) and physical vapor deposition (PVD) tools. Praxair Electronics also manufactures other parts for those tools, including gas dispersion plates, chamber and liner electrodes, gas rings, and baffles.
Praxair Electronics' Advanced Components full-service offerings include:
- electrostatic chucks
- aluminum chamber components, including 200mm and 300mm machining, computer-controlled anodization, robotic grit blasting, and robotic thermal spray
- ceramic chamber components
- supply chain management
As a direct beneficiary of the R&D work conducted at Praxair Electronics' facilities, the Advanced Components group is an industry leader in the production of new high-performance solid ceramic materials.
About Praxair Electronics
Praxair Electronics provides the global semiconductor industry with process consumables, including a full line of gases and materials; sputtering targets and CMP slurries; on-site services; chamber components including electrostatic chucks; and spare parts logistics services. In 2003, Praxair's sales to the global electronics industry were $420 million. More information on Praxair Electronics is available on the Internet at: www.praxair.com/electronics.
Praxair is the largest industrial gases company in North and South America, and one of the largest worldwide, with 2003 sales of $5.6 billion. The company produces, sells and distributes atmospheric and process gases, and high-performance surface coatings. Praxair products, services and technologies bring productivity and environmental benefits to a wide variety of industries, including aerospace, chemicals, food and beverage, electronics, energy, healthcare, manufacturing, metals and others. More information on Praxair is available on the Internet at www.praxair.com.