Sulfur Hexafluoride
Sulfur Hexafluoride (SF6) is a colorless, odorless, nonflammable, liquified gas.
Applications
Used as a dielectric in transformers; used as a blanketing agent in metal fabrication.
In semiconductor fabrication: fluorine source for high density plasma etching: offers high selectivity without generating carbon by-products.
Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Copper; Monel
Plastics: Kel-F®; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel®; Kynar®; PVC
Elastomers: Viton®; Buna-N; Neoprene; Polyurethane
Molecular Weight
146.05
Specific Gravity (Air = 1)
5.11
MSDS Reference
Odor
Odorless
CAS Registry No.
2551-62-4
Applications
Used as a dielectric in transformers; used as a blanketing agent in metal fabrication.
In semiconductor fabrication: fluorine source for high density plasma etching: offers high selectivity without generating carbon by-products.
Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Copper; Monel
Plastics: Kel-F®; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel®; Kynar®; PVC
Elastomers: Viton®; Buna-N; Neoprene; Polyurethane
Molecular Weight
146.05
Specific Gravity (Air = 1)
5.11
MSDS Reference
 | » | P-4657-C |
Odor
Odorless
CAS Registry No.
2551-62-4
| « Download the spec sheet (PDF=147KB) |
